Untertitel:: (1) Handbook Techniques and Applications Design Methods, (2) Fabrication Techniques, (3) Manufacturing Methods, (4) Sensors and Actuators, (5) Medical Applications and MOEMS
Verlag:: SPRINGER
Erschienen:: 08.10.2007
Seitenanzahl:: 2096
ISBN:: 0387257861
EAN:: 9780387257860
Sprache:: Englisch
Format:: PDF
Schutz:: Dig. Wass.
Downloadzeit:: Maximaler Downloadzeitraum: 24 Monate

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Mems/Nems

<P>This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists. </P>